Ellipsometer
EUROCALTECH's Semiconductor Wafer Thickness and Step Height Analysis
• Utilizes advanced technology.
• Uses VASE® variable-angle spectroscopic ellipsometer.
• Provides UV to NIR light from Xenon lamp.
• Covers 193 nm to 1700 nm with stacked Si/InGaAs detectors.
• Uses AutoRetarderTM in rotating analyzer setup.